The influence of annealing on yttrium oxide thin film deposited by reactive magnetron sputtering: Process and microstructure
Journal article published in 2017 by
Y. Mao,
J. Engels,
A. Houben,
M. Rasinski,
J. Steffens,
A. Terra,
C.-H. Linsmeier 
,
J. W. Coenen
,
J. W. Coenen
