The following article appeared in Journal of Applied Physics 114.21 (2013): 213508 and may be found at http://scitation.aip.org/content/aip/journal/jap/114/21/10.1063/1.4837655 ; Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B4C target and N2 as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.