Published in
Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy, p. 3.10-343-3.10-356
DOI: 10.1201/9781420026580.ch3.1
Fabrication of SiGe HBT BiCMOS Technology
DOI: 10.1201/9781420066890.ch12
Links
Tools
Industry Examples at the State-of-the-Art: ST
Book chapter published in 2005 by
B. Szelag,
J. Mourier,
M. Laurens,
Alain Chantre,
P. Chevalier,
A. Monroy,
B. Martinet,
M. Marty,
H. Baudry,
G. Troillard
