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ECS Meeting Abstracts, 29(MA2010-02), p. 1789-1789, 2010

DOI: 10.1149/ma2010-02/29/1789

The Electrochemical Society, ECS Transactions, 5(33), p. 65-69, 2010

DOI: 10.1149/1.3481220

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The Influence of Electromechanical Stress on the Stability of Nanocrystalline Silicon Thin Film Transistors Made on Colorless Polyimide Foil

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Staggered bottom-gate hydrogenated nanocrystalline silicon (nc-Si:H) thin film transistors (TFTs) fabricated on flexible transparent polyimide substrates were investigated. The saturation electron field-effect mobility and electrical bias-stress stability of these TFTs were evaluated under applied tensile mechanical strain parallel to the source-drain direction. The mobilities increased accompanying with deteriorated electrical stabilities as the applied tensile strain increased. The power-law dependence between threshold voltage shift and gate-bias stressing time indicates that the instability is mainly caused by the state creation at the interface between nc-Si:H channel and gate dielectric.