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ECS Meeting Abstracts, 25(MA2009-02), p. 2127-2127, 2009

DOI: 10.1149/ma2009-02/25/2127

The Electrochemical Society, ECS Transactions, 6(25), p. 249-263, 2009

DOI: 10.1149/1.3206624

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Progress Towards Passivation of High-Mobility Channels

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The need for high-k gate dielectrics and metal gates into advanced integrated circuits has re-opened the door to germanium and III-V compounds as potential replacements for silicon channels, offering the possibility to further increase the performances of metal-oxide-semiconductor devices, as well as adding new circuit functionalities. A fundamental issue related to high-mobility channels is the passivation of their interfaces, i.e. achieving a low density of interface defects, approaching state of the art Si-based devices. Promising approaches for the passivation of Ge channels are discussed and insights obtained by combining experimental characterization techniques with first-principles simulations are highlighted.