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ECS Meeting Abstracts, 16(MA2007-01), p. 801-801, 2007

DOI: 10.1149/ma2007-01/16/801

The Electrochemical Society, ECS Transactions, 2(6), p. 279-284, 2007

DOI: 10.1149/1.2731195

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Thermally Stable Novel Metal Contacts on Bulk, Single-Crystal n-type ZnO

Journal article published in 2007 by Jonathan Wright, R. Khanna, Lars F. Voss, Luc Stafford ORCID, Brent P. Gila, David P. Norton, Steve J. Pearton, Fan Ren, Ivan I. Kravchenko
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The contact characteristics on bulk single-crystal n-type ZnO of TiB2/Pt/Au, ZrB2/Pt/Au and Ir/Au metallization schemes deposited by sputtering are reported as a function of annealing temperature in the range 200-1000{degree sign}C (N2 ambient). Boride contacts exhibited Ohmic behavior with minimum specific contact resistance between 10-3 and 10-5 Ωcm2 after a 700{degree sign}C or above anneal. The contacts transition to rectifying behavior after annealing above 900{degree sign}C, coincident with a degraded surface morphology. Ir contacts exhibit higher thermal stability than both Boride contacts investigated, exhibiting a minimum specific contact resistance of 3.6x10-6 Ωcm2 after annealing at 1000{degree sign}C. Ir contacts showed very little change in resistance after extended aging (30 days) at 350{degree sign}C.