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The Electrochemical Society, ECS Transactions, 5(3), p. 341-347, 2006

DOI: 10.1149/1.2357223

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Novel Thermally Stable Contacts to GaN

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Ohmic and Schottky contact formation on n-GaN using novel boride-based metallization schemes was studied. The minimum specific contact resistance achieved is 1.6x10-6 ohm cm2 for Ti/Al/TiB2/Ti/Au after annealing over a broad range of temperatures (700-900oC). Boride/Ti/Au metallurgies exhibited rectifying behavior up to 700oC anneal, the barrier height being ~0.55 eV for all borides. Comparison of Ti/Al/TiB2/Ti/Au and conventional Ti/Al/Pt/Au metallizations for AlGaN/GaN high electron mobility transistors subjected to long-term annealing at 350oC show that the improved thermal stability of the boride-based Ohmic contacts has a beneficial effect on the long-term stability of the device.