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Microelectronics, Microsystems and Nanotechnology - Papers Presented at MMN 2000
DOI: 10.1142/9789812810861_0025
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A Comparison Between Point Defect Injecting Processes in Silicon Using Extended Defects and Dopant Marker Layers as Point Defect Detectors
Proceedings article published in 2001 by
D. Skarlatos,
D. Tsoukalas,
C. Tsamis,
M. Omri,
L. F. Giles,
A. Claverie,
J. Stoemenos
This paper was not found in any repository, but could be made available legally by the author.
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