Published in
Optical Measurement Systems for Industrial Inspection VII
DOI: 10.1117/12.889428
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Structured-illumination microscopy on technical surfaces: 3D metrology with nanometer sensitivity
Proceedings article published in 2011 by
Markus Vogel,
Zheng Yang,
Alexander Kessel 
,
Christoph Kranitzky,
Christian Faber,
Gerd Häusler
,
Christoph Kranitzky,
Christian Faber,
Gerd Häusler
This paper was not found in any repository, but could be made available legally by the author.
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