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Micro (MEMS) and Nanotechnologies for Defense and Security

DOI: 10.1117/12.721502

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Complex MEMS device: microshutter array system for space applications

Proceedings article published in 2007 by Mary J. Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, Dave Franz, Larry Hess, Ron Hu, Kamili Jackson, Murzy Jhabvala and other authors.
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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