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Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III

DOI: 10.1117/12.706308

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MEMS microshutter arrays for James Webb Space Telescope

Proceedings article published in 2006 by Mary J. Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, David Franz, Larry Hess, Ron Hu, Kamili Jackson, Murzy Jhabvala and other authors.
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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