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Smart Sensors, Actuators, and MEMS II

DOI: 10.1117/12.608299

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Large displacement spring-like electro-mechanical thermal actuators with insulator constraint beams

Proceedings article published in 2005 by Jk K. Luo ORCID, Yq Q. Fu, Aj J. Flewitt ORCID, Sm M. Spearing, Na A. Fleck, Wi I. Milne
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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