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Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

DOI: 10.1117/12.583284

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Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation

Proceedings article published in 2005 by Mladen Mitic, Soren E. Andresen, Victor C. Chan, Tilo M. Buehler, Andrew J. Ferguson, Eric Gauja, Fay E. Hudson, David J. Reilly, A. R. Hamilton, Andrew S. Dzurak, Robert G. Clark, Changyi Yang, Toby Hopf, Christopher I. Pakes ORCID, David N. Jamieson
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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