Published in
Optical Micro- and Nanometrology in Manufacturing Technology
DOI: 10.1117/12.546016
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Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor
Proceedings article published in 2004 by
Giuseppe Coppola 
,
Sergio De Nicola,
Pietro Ferraro,
Andrea Finizio,
Piera Maccagnani ,
Giovanni Pierattini
,
Sergio De Nicola,
Pietro Ferraro,
Andrea Finizio,
Piera Maccagnani ,
Giovanni Pierattini
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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