Published in
Metrology, Inspection, and Process Control for Microlithography XXVIII
DOI: 10.1117/12.2048225
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Optimizing hybrid metrology through a consistent multi-tool parameter set and uncertainty model
Proceedings article published in 2014 by
R. M. Silver,
B. M. Barnes,
N. F. Zhang,
H. Zhou,
A. Vladár,
J. Villarrubia,
J. Kline,
D. Sunday 
,
A. Vaid
,
A. Vaid
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