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Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
DOI: 10.1117/12.2019720
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VUV-UV multiwavelength excitation process for high-quality ablation of fused silica
Proceedings article published in 2013 by
Koji Sugioka,
Katsumi Midorikawa
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