Published in
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
DOI: 10.1109/transducers.2013.6626935
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All-oxide microcantilevers: Perspectives for device applications
Proceedings article published in 2013 by
L. Pellegrino,
N. Manca 
,
T. Kanki,
S. Yamasaki,
H. Tanaka,
M. Biasotti ,
R. Buzio ,
E. Bellingeri,
V. Ceriale,
A. S. Siri,
D. Marre
,
T. Kanki,
S. Yamasaki,
H. Tanaka,
M. Biasotti ,
R. Buzio ,
E. Bellingeri,
V. Ceriale,
A. S. Siri,
D. Marre
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