Published in
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
DOI: 10.1109/sensor.1997.613621
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Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors
Journal article published in 1970 by
P. Maccagnani 
,
R. Angelucci,
P. Pozzi,
A. Poggi,
L. Dori,
Gc C. Cardinali,
P. Negrini,
Ieee
,
R. Angelucci,
P. Pozzi,
A. Poggi,
L. Dori,
Gc C. Cardinali,
P. Negrini,
Ieee
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