Published in
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
DOI: 10.1109/nems.2012.6196732
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Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range
Proceedings article published in 2012 by
Liang Lou,
Songsong Zhang,
Woo-Tae Park,
Lishiah Lim,
Dim-Lee Kwong,
Chengkuo Lee 
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