Published in
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
DOI: 10.1109/memsys.2010.5442334
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Wafer scale coating of polymer cantilever fabricated by nanoimprint lithography
Journal article published in 2010 by
Anders Greve,
Soren Dohn,
Stephan Keller,
Asger L. Vig,
Anders Kristensen,
Claus H. Nielsen,
Niels B. Larsen 
,
Anja Boisen,
Ieee
,
Anja Boisen,
Ieee
This paper is available in a repository.
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