Published in
2007 IEEE 20th International Vacuum Nanoelectronics Conference
DOI: 10.1109/ivnc.2007.4480993
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Operation of the Digital Electrostatic e-beam Array Lithography (DEAL) prototype with dose control
Proceedings article published in 2007 by
L. R. Baylor,
W. L. Gardner,
S. J. Randolph,
Y. F. Guan,
P. D. Rack,
J. A. Moore,
M. N. Ericson
This paper was not found in any repository, but could be made available legally by the author.
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