Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept - L. R. Baylor, W. L. Gardner, X. Yang, R. J. Kasica, B. Blalock, C. Durisety, J. Fowlkes, D. K. Hensley, S. Islam, D. C. Joy, A. V. Melechko, P. D. Rack, S. J. Randolph, R. Rucker, D. K. Thomas - Dissemin

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2005 International Vacuum Nanoelectronics Conference

DOI: 10.1109/ivnc.2005.1619491

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Progress toward realization of the digital electrostatic e-beam array lithography (DEAL) concept

Proceedings article published in 2006 by L. R. Baylor, W. L. Gardner, X. Yang, R. J. Kasica, B. Blalock, C. Durisety, J. Fowlkes, D. K. Hensley, S. Islam, D. C. Joy, A. V. Melechko, P. D. Rack, S. J. Randolph, R. Rucker, D. K. Thomas and other authors.

This paper was not found in any repository, but could be made available legally by the author.

This paper was not found in any repository, but could be made available legally by the author.

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