Published in
2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers.
DOI: 10.1109/imnc.2002.1178535
Links
Tools
Single phosphorus ions implantation into prefabricated nanometre cells of silicon devices for quantum qubits fabrication
Proceedings article published in 2003 by
Changyi Yang,
D. N. Jamieson,
C. Pakes 
,
S. Prawer,
A. Dzurak,
F. Stanley,
R. G. Clark,
L. Macks,
D. George,
P. Spizziri,
E. Gauja
,
S. Prawer,
A. Dzurak,
F. Stanley,
R. G. Clark,
L. Macks,
D. George,
P. Spizziri,
E. Gauja
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 