A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers
Proceedings article published in 2006 by
F. Mancarella,
A. Roncaglia,
F. Tamarri,
I. Elmi 
,
G. C. Cardinali,
M. Severi,
Ieee
,
G. C. Cardinali,
M. Severi,
Ieee
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