Published in
2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
DOI: 10.1109/eurosime.2014.6813785
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Evaluation of the residual stress distribution in thin films by means of the ion beam layer removal method
Proceedings article published in 2014 by
Darjan Kozic,
Ruth Treml,
Ronald Schongrundner,
Roland Brunner,
Daniel Kiener 
,
Thomas Antretter,
Hans-Peter Ganser
,
Thomas Antretter,
Hans-Peter Ganser
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