Published in
2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC)
DOI: 10.1109/essderc.2013.6818842
Links
Tools
Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 