Published in
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
DOI: 10.1109/cleopr.2013.6600258
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Development of MEMS electric split-ring resonator arrays as tunable THz filters
Proceedings article published in 2013 by
Fusheng,
Xinhai Zhang,
You Qian,
F. Ma,
Yu-Sheng Lin,
You Qian,
Yu-Sheng Lin,
Hongwei Liu,
Hongwei Liu,
Xinhai Zhang,
Chengkuo Lee 
,
Chengkuo Lee
,
Chengkuo Lee
This paper is available in a repository.
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Abstract
Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented, which employ deformable microelectromechanical curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability can be applied in tunable metamaterial devices.