ABSTRACTIn this work, we study CdTe thin films used in CdTe/CdS solar cells with a substrate configuration, which allows for better control in forming the junction, and the possibility for using flexible non-transparent substrates. We studied the properties of CdTe films grown at 450° and 550°C, with and without a Cu_xTe layer, and before and after CdCl₂ treatment. We analyzed the structural and electro-optical properties using electron backscatter diffraction (EBSD), cathodoluminescence (CL) and X-ray diffraction (XRD), and investigated how the film structure, stress, and defect structure changes with the different growth conditions.