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MDPI, Micromachines, 2(8), p. 41

DOI: 10.3390/mi8020041

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Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

Journal article published in 2017 by Vasileios Mitrakos, Lisa Macintyre, Fiona C. Denison, Philip J. W. Hands, Marc P. Y. Desmulliez ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (