Published in
Springer Verlag, Journal of Nanoparticle Research, 2(18)
DOI: 10.1007/s11051-016-3343-z
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Deposition of conductive TiN shells on SiO2 nanoparticles with a fluidized bed ALD reactor
Journal article published in 2016 by
Arjen Didden,
Philipp Hillebrand,
Markus Wollgarten,
Bernard Dam,
Roel van de Krol 
This paper is available in a repository.
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