Use of computational fluid dynamics to model chemical process system has received much attention in recent years. However, even with state-of-the-art computing, it is still difficult to perform simulations with many physical factors taken into accounts. Hence, translation of such models into computationally easy surrogate models is necessary for successful applications of such high fidelity models to process design optimization, scale-up and model predictive control. In this work, the methodology, statistical background and past applications to chemical processes of meta-model development were reviewed. The objective is to help interested researchers be familiarized with the work that has been carried out and problems that remain to be investigated.