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Trans Tech Publications, Materials Science Forum, (858), p. 523-526

DOI: 10.4028/www.scientific.net/msf.858.523

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1950°C Annealing of Al<sup>+</sup> Implanted 4H-SiC: Sheet Resistance Dependence on the Annealing Time

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Data provided by SHERPA/RoMEO

Abstract

This study shows that, after annealing at 1950°C, a 1×1020 cm-3 Al+ implanted 4H-SiC material shows a decreasing resistivity with increasing annealing time in the range 5-25 min. After this, the resistivity remains constant up to an annealing time of 40 min. The estimated minimum time to gain the thermal equilibrium in this implanted material at 1950°C is 12 min. Electrical characterization has been performed in the 20-680 K temperature range.