Microassembly process is one of the difficulties in the field of manufacturing. According to the structural characteristics and assembly process difficultly of 3D meso-scale micro-devices and the requirement of multi-axis control in coaxial alignment assembly, this paper developed a vision and force feedback control method oriented to Microassembly System with Coaxial Alignment. This system combines multi-axis motion control with machine vision and force sensors, which can complete nondestructive assembly of parts and increase the precision of microassembly process into micron level.