Dissemin is shutting down on January 1st, 2025

Published in

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

DOI: 10.1109/dtip.2014.7056677

Links

Tools

Export citation

Search in Google Scholar

Impact wear and other contact effects on the electro-mechanical reliability of MEMS

Proceedings article published in 2014 by G. De Pasquale, A. Somà, M. Barbato ORCID, G. Meneghesso
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Within reliability issues in the MEMS field, the contact problem is one of the most complex to model and validate. In fact, it is influenced by many electro-thermo-mechanical parameters that make extremely difficult to predict the damaging effects on the involved surfaces and its implications on the device performances and reliability. The goal of this paper is to analyze the impact wear and the other effects of contact on the electromechanical properties of MEMS by means of dedicated experiments. Long term tests of repetitive impact loading are reported with the goal of relating the excitation parameters to the electrical RF performances degradation of the devices due to impact effects on electrode surfaces.