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Published in

2015 AEIT International Annual Conference (AEIT)

DOI: 10.1109/aeit.2015.7415224

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MEMS force microactuator with displacement sensing for mechanobiology experiments

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

This paper presents a Micro Electro-Mechanical System (MEMS) that performs electrostatic force actuation and capacitive microdisplacement sensing in the same chip. By driving the actuator with a given voltage, a known force can be applied to a microsample under test by using a silicon probe tip, while the obtained displacement is measured. This allows to extract the mechanical properties of the microsample entirely on chip, and to derive its force-displacement curve without external equipment. The proposed device is intended for mechanobiology experiments, where the microsample is made of biological tissues or cells. The device generates a force in the order of few micronewtons and a maximum displacement of 1.8 μm can be measured.