Dissemin is shutting down on January 1st, 2025

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IOP Publishing, Nanotechnology, 18(27), p. 185601

DOI: 10.1088/0957-4484/27/18/185601

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Effect of substrate polishing on the growth of graphene on 3C–SiC(111)/Si(111) by high temperature annealing

Distributing this paper is prohibited by the publisher
Distributing this paper is prohibited by the publisher

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Abstract

We analyse the effects of substrate polishing and of the epilayer thickness on the quality of graphene layers grown by high temperature annealing on 3C–SiC(111)/Si(111) by scanning tunnelling microscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, low energy electron diffraction and high resolution angle resolved photoemission spectroscopy. The results provide a comprehensive set of data confirming the superior quality of the graphene layers obtained on polished substrates, and the limitations of the growth obtained on unpolished surfaces.