Published in
SpringerOpen, Nanoscale Research Letters, 1(7), 2012
Links
- ORCID
- SpringerOpen | PDF
- [europepmc.org] | PDF
- [www.ncbi.nlm.nih.gov] | PDF
- [www.ncbi.nlm.nih.gov] | PDF
- [nanoscalereslett.springeropen.com] | PDF
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Plasma-deposited fluoropolymer film mask for local porous silicon formation
Journal article published in 2012 by
Thomas Defforge 
,
Marie Capelle,
François Tran-Van,
Gaël Gautier
,
Marie Capelle,
François Tran-Van,
Gaël Gautier
This paper is made freely available by the publisher.
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