Published in
Elsevier, Microelectronic Engineering, (156), p. 65-69, 2016
DOI: 10.1016/j.mee.2016.02.058
Links
Tools
Characterisation of the barrier formation process of self-forming barriers with CuMn, CuTi and CuZr alloys
Journal article published in 2016 by
Mathias Franz,
Ramona Ecke,
Christian Kaufmann,
Jakob Kriz,
Stefan E. Schulz
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 