Published in
The Electrochemical Society, Journal of The Electrochemical Society, 9(160), p. D372-D379
DOI: 10.1149/2.082309jes
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Systematic Study of Anodic Etching of Highly Doped N-type 4H-SiC in Various HF Based Electrolytes
Journal article published in 2013 by
G. Gautier,
J. Biscarrat,
D. Valente,
T. Defforge 
,
A. Gary,
F. Cayrel
,
A. Gary,
F. Cayrel
This paper was not found in any repository, but could be made available legally by the author.
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