Thin films from the monolayer range to the thickness of 40 nm of the perfluorinated copper phthalocyanine (F₁₆PcCu) were prepared by physical vapor deposition on freshly cleaved (001) faces of the alkali halides NaCl , KCl and KBr . The different lattice constants of the substrates provided sufficient difference to trigger the growth of differently ordered phases of F₁₆PcCu . Electron diffraction, Atomic Force Microscopy and UV-vis spectroscopy were used to characterize the structure for F₁₆PcCu monolayers and for films of increasing average film thickness towards bulk films. A square lattice of flat-lying F₁₆PcCu is proposed for the first monolayers. In the bulk films, phases already described for F₁₆PcCu on other substrates were formed, but also a new phase was discovered.