Thin film titanium/poly-para-xylylene nanocomposites with controlled Ti content are prepared by vacuum coevaporation and cocondensation of Ti and paracyclophane. The structure and chemical composition of as-deposited samples and the changes of electrical resistivity, which they undergo upon heating, are studied by atomic force microscopy, optical absorption spectroscopy, and the temperature coefficient of the electrical resistivity. It is shown that vacuum coevaporation results in the production of nanocomposite thin films with average Ti particle size of 10–50 nm. The inorganic phase is shown to be amorphous Ti for the samples with high metal content, whereas for the low-filled nanocomposites it consists of amorphous titanium oxide. Two types of kinetics of the nanocomposite oxidation process have been found and modeled by (i) inverse logarithmic and (ii) logarithmic functions depending on the metal content within the thin film. After a long preconditioning period in air the electrical conductivity of the thin film nanocomposites was carefully investigated by two-probe DC measurements. A strong correlation between the concentration of Ti in the thin films and the electrical conductivity dependency on temperature is found and modeled by a heterogeneous model of conductivity.