Published in
MAIK Nauka/Interperiodica, Russian Journal of Applied Chemistry, 6(86), p. 817-823
DOI: 10.1134/s1070427213060050
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Atomic-layer deposition of thin titanium dioxide films from tetramethoxytitanium and water
Journal article published in 2013 by
A. P. Alekhin,
A. M. Markeev 
,
D. V. Ovchinnikov ,
A. A. Solov’ev,
V. F. Toknova
,
D. V. Ovchinnikov ,
A. A. Solov’ev,
V. F. Toknova
This paper was not found in any repository, but could be made available legally by the author.
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