Published in
Society of Photo-optical Instrumentation Engineers, Journal of Micro/Nanolithography, MEMS, and MOEMS, 1(4), p. 013012
DOI: 10.1117/1.1857551
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Digital holography microscope as tool for microelectromechanical systems characterization and design
Journal article published in 2005 by
M. Iodice,
A. Finizio,
S. De Nicola,
G. Pierattini,
P. Ferraro,
C. Magro,
G. E. Spoto,
G. Coppola 
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Preprint: archiving forbidden
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