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American Chemical Society, Chemistry of Materials, 8(25), p. 1458-1463, 2013

DOI: 10.1021/cm303759r

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Fabrication of Arrays of Lead Zirconate Titanate (PZT) Nanodots via Block Copolymer Self-Assembly

This paper is available in a repository.
This paper is available in a repository.

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Abstract

This Article presents a simple methodology for the fabrication of two-dimensional arrays of lead zirconate titanate (PZT) nanodots on n-doped Si substrates via the directed self-assembly of PS-b-PEO block copolymer templates. The approach produces highly ordered PZT nanodot patterns, with lateral widths and heights as small as 20 and 10 nm, respectively, and a coverage density as high as ∼68 × 109 nanodots cm–2. The existence of a perovskite phase in the nanodots was confirmed by X-ray diffraction and X-ray photoelectron spectroscopy. The piezo-amplitude and ferroelectric domain response obtained from the nanodots, through piezoresponse force microscopy, confirmed the presence of ferroelectricity in the PZT arrays. Notably, PZT nanodots with a thickness ∼10 nm, which is close to the critical size limit of PZT, showed ferroelectric behavior. The presence of a multi-a/c domain structure in the nanodots was attributed to their polycrystalline nature.