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Cambridge University Press, Microscopy and Microanalysis, S2(15), p. 1240-1241, 2009

DOI: 10.1017/s143192760909802x

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Measurements of Porous Networks in Low-k Dielectric by Three-dimensional Electron Tomography

Journal article published in 2009 by P. Ercius, Hl Xin ORCID, Da Muller
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009