Published in
Springer Verlag, Microsystem Technologies, 7-8(18), p. 835-842
DOI: 10.1007/s00542-011-1379-7
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Cleaning of structured templates from nanoparticle accumulation using silicone
Journal article published in 2011 by
S. Merzsch,
H. S. Wasisto,
A. Waag,
I. Kirsch,
E. Uhde 
,
T. Salthammer,
E. Peiner
,
T. Salthammer,
E. Peiner
This paper was not found in any repository, but could be made available legally by the author.
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