Published in
American Chemical Society, Nano Letters, 8(14), p. 4406-4412, 2014
DOI: 10.1021/nl5013773
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Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function
Journal article published in 2014 by
Vitor R. Manfrinato,
Jianguo Wen,
Lihua Zhang,
Yujia Yang,
Richard G. Hobbs,
Bowen Baker,
Dong Su 
,
Dmitri Zakharov,
Nestor J. Zaluzec,
Dean J. Miller,
Eric A. Stach,
Karl K. Berggren
,
Dmitri Zakharov,
Nestor J. Zaluzec,
Dean J. Miller,
Eric A. Stach,
Karl K. Berggren
This paper was not found in any repository, but could be made available legally by the author.
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