Published in
Institute of Electrical Engineers of Japan, Denki Gakkai Ronbunshi. E, Sensa, Maikuromashin Bumonshi / IEEJ Transactions on Sensors and Micromachines, 5(135), p. 145-151
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Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films
Journal article published in 2015 by
Tsunehisa Tanaka,
Shuichi Murakami,
Mayumi Uno 
,
Kaoru Yamashita
,
Kaoru Yamashita
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
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