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Proceedings of the 2014 3rd International Conference on Innovation, Communication and Engineering (ICICE 2014), Guiyang, Guizhou, P.R. China, October 17-22, 2014, p. 853-857

DOI: 10.1201/b18737-181

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Memory and electrical properties of (100)-oriented aluminum nitride thin films prepared by radio frequency magnetron sputtering

Book chapter published in 2015 by Maw-Shung Lee, Sean Wu, Shih-Bin Jhong, Kai-Huang Chen, Kuan-Ting Liu
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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