Published in
2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum
DOI: 10.1109/freq.2009.5168193
Institute of Electrical and Electronics Engineers, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1(57), p. 23-29, 2010
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Sputtered SiO<sub>2</sub> as low acoustic impedance material for Bragg mirror fabrication in BAW resonators
Journal article published in 2009 by
J. Olivares,
E. Wegmann,
J. Capilla,
E. Iborra 
,
M. Clement,
L. Vergara,
R. Aigner
,
M. Clement,
L. Vergara,
R. Aigner
This paper is available in a repository.
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